Enhanced electrical and optical properties of room temperature deposited Aluminium doped Zinc Oxide (AZO) thin films by excimer laser annealing
- Submitting institution
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Sheffield Hallam University
- Unit of assessment
- 12 - Engineering
- Output identifier
- 2920
- Type
- D - Journal article
- DOI
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10.1016/j.optlaseng.2015.12.010
- Title of journal
- Optics and Lasers in Engineering
- Article number
- -
- First page
- 45
- Volume
- 80
- Issue
- -
- ISSN
- 0143-8166
- Open access status
- Out of scope for open access requirements
- Month of publication
- January
- Year of publication
- 2016
- URL
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- Supplementary information
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- Request cross-referral to
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- Output has been delayed by COVID-19
- No
- COVID-19 affected output statement
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- Forensic science
- No
- Criminology
- No
- Interdisciplinary
- No
- Number of additional authors
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5
- Research group(s)
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-
- Proposed double-weighted
- No
- Reserve for an output with double weighting
- No
- Additional information
- This combination of low substrate temperature RF magnetron sputtering and laser annealing produces functional AZO thin films with electro-optical characteristics that are close to those of the industry standard, ITO, but crucially via low thermal-budget processing. The adapted fabrication route is proposed as one that could be applied to large volume production. The research led to an invited Keynote Talk https://www.nanotexnology.com/2017/images/stories/food/NN17_PROGRAM.pdf (W.Cranton) Nanotexnology 2017, Thessaloniki, Greece. Deposition and photonic processing of metal oxide thin films for low temperature electronics
- Author contribution statement
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- Non-English
- No
- English abstract
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