Fabrication and characterisation of nanocrystalline graphite MEMS resonators using a geometric design to control buckling
- Submitting institution
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University of Ulster
- Unit of assessment
- 12 - Engineering
- Output identifier
- 77509440
- Type
- D - Journal article
- DOI
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10.1088/1361-6439/aa7ebb
- Title of journal
- Journal of Micromechanics and Microengineering
- Article number
- 095015
- First page
- 1
- Volume
- 27
- Issue
- 9
- ISSN
- 0960-1317
- Open access status
- Technical exception
- Month of publication
- August
- Year of publication
- 2017
- URL
-
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- Supplementary information
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-
- Request cross-referral to
- -
- Output has been delayed by COVID-19
- No
- COVID-19 affected output statement
- -
- Forensic science
- No
- Criminology
- No
- Interdisciplinary
- No
- Number of additional authors
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4
- Research group(s)
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A - Healthcare Sensor Systems
- Proposed double-weighted
- No
- Reserve for an output with double weighting
- No
- Additional information
- This important research helped elucidate how built-in stress in thin films can tailor the mechanical behaviour of carbon MEMS sensors and actuators. As a result of this new knowledge, recent complimentary work on carbon MEMS, which are attractive as physical and biological sensors emerged. The group of Simionescu, (Rev. Adv. Mater. Sci. 2020; 59:306–313) used this information to develop novel strain-sensors with very high sensitivity. This work aided one co-author (Pu) in obtaining funding via the Fundamental Research Grants Scheme, Ministry of Higher Education, Malaysia for further work ongoing on carbon MEMS.
- Author contribution statement
- -
- Non-English
- No
- English abstract
- -