A novel hybrid technique to fabricate silicon-based micro-implants with near defect-free quality for neuroprosthetics application
- Submitting institution
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University of Newcastle upon Tyne
- Unit of assessment
- 12 - Engineering
- Output identifier
- 263900-134271-1293
- Type
- D - Journal article
- DOI
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10.1016/j.msec.2020.110737
- Title of journal
- Materials Science and Engineering C
- Article number
- 110737
- First page
- -
- Volume
- 110
- Issue
- -
- ISSN
- 0928-4931
- Open access status
- Compliant
- Month of publication
- February
- Year of publication
- 2020
- URL
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https://doi.org/10.1016/j.msec.2020.110737
- Supplementary information
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- Request cross-referral to
- -
- Output has been delayed by COVID-19
- No
- COVID-19 affected output statement
- -
- Forensic science
- No
- Criminology
- No
- Interdisciplinary
- No
- Number of additional authors
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5
- Research group(s)
-
-
- Proposed double-weighted
- No
- Reserve for an output with double weighting
- No
- Additional information
- The research presented in this paper led to a patented hybrid micromachining method for brittle materials (WO2018/065783, filed in US, EU and China). The technique offers great advantages over conventional chemical etching techniques, e.g. DRIE, for small batch microfabrication of silicon-based devices. The work has been further explored in a Northern Accelerator Project (2019-2020) to build an integrated machining system and broaden the application, and the commercialisation route has been explored the Midlands ICURe project (ref: 900170) and the Innovate UK FY20 grant (104733 MicroBritt) to form a spinout company.
- Author contribution statement
- -
- Non-English
- No
- English abstract
- -