A scalable pressure sensor based on an electrothermally and electrostatically operated resonator
- Submitting institution
-
Loughborough University
- Unit of assessment
- 12 - Engineering
- Output identifier
- 2277
- Type
- D - Journal article
- DOI
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10.1063/1.5003563
- Title of journal
- Applied Physics Letters
- Article number
- 223503
- First page
- 223503
- Volume
- 111
- Issue
- 22
- ISSN
- 0003-6951
- Open access status
- Deposit exception
- Month of publication
- November
- Year of publication
- 2017
- URL
-
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- Supplementary information
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- Request cross-referral to
- -
- Output has been delayed by COVID-19
- No
- COVID-19 affected output statement
- -
- Forensic science
- No
- Criminology
- No
- Interdisciplinary
- No
- Number of additional authors
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4
- Research group(s)
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-
- Proposed double-weighted
- No
- Reserve for an output with double weighting
- No
- Additional information
- This paper had a significant impact on the state of the art of air pressure sensors based on mechanical bifurcation and air thermal conductivity monitoring. The proposed technique is submitted for patent application under the number PCT/IB2018/054430, aiming towards future sensor commercialization. This output led to significant further developments in miniaturized and scalable pressure and gas detection, leading to the submission of two other patent applications (PCT/IB2020/053571 and PCT/IB2019/055844).
- Author contribution statement
- -
- Non-English
- No
- English abstract
- -
