Enhancement of measurement accuracy of optical stereo deflectometry based on imaging model analysis
- Submitting institution
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The University of Huddersfield
- Unit of assessment
- 12 - Engineering
- Output identifier
- 82
- Type
- D - Journal article
- DOI
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10.1016/j.optlaseng.2018.07.007
- Title of journal
- Optics and Lasers in Engineering
- Article number
- -
- First page
- 1
- Volume
- 111
- Issue
- -
- ISSN
- 0143-8166
- Open access status
- Compliant
- Month of publication
- July
- Year of publication
- 2018
- URL
-
-
- Supplementary information
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-
- Request cross-referral to
- -
- Output has been delayed by COVID-19
- No
- COVID-19 affected output statement
- -
- Forensic science
- No
- Criminology
- No
- Interdisciplinary
- No
- Number of additional authors
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2
- Research group(s)
-
-
- Proposed double-weighted
- No
- Reserve for an output with double weighting
- No
- Additional information
- This paper presents a novel holistic calibration method for stereo deflectometry to improve measurement accuracy. It compensates system distortion based on an iterative algorithm which improves the PV (peak value) measurement error of a flat mirror from 282 nm to 69.7 nm. The improvement makes the measurement as accurate as an interferometry for specular surface form measurement. It attracted great interests from research society and industries which lead to being invited to Keynotes at the International Summit on Optics, Photonics and Laser technologies (2019, San Francisco), the icOPEN 2019 (Thailand) and it is a foundation for the EPSRC (EP/T024844/1, 2020).
- Author contribution statement
- -
- Non-English
- No
- English abstract
- -