Chemical and structural analysis on magnetic tunnel junctions using a decelerated scanning electron beam
- Submitting institution
-
University of York
- Unit of assessment
- 12 - Engineering
- Output identifier
- 66223099
- Type
- D - Journal article
- DOI
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10.1038/s41598-018-25638-8
- Title of journal
- Scientific Reports
- Article number
- 7585
- First page
- -
- Volume
- 8
- Issue
- -
- ISSN
- 2045-2322
- Open access status
- Compliant
- Month of publication
- May
- Year of publication
- 2018
- URL
-
-
- Supplementary information
-
-
- Request cross-referral to
- -
- Output has been delayed by COVID-19
- No
- COVID-19 affected output statement
- -
- Forensic science
- No
- Criminology
- No
- Interdisciplinary
- No
- Number of additional authors
-
4
- Research group(s)
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B - Intelligent Systems and Nano-Science
- Proposed double-weighted
- No
- Reserve for an output with double weighting
- No
- Additional information
- Defects formed in buried interfaces in magnetic random access memories can now be identified. The production yield of the memories was improved by 15% by feeding back to the fabrication process. This method was filed as a UK patent (GB1522137.7), which has been exclusively assigned to JEOL UK (Contact: Two senior engineers, JEOL). Joint efforts have been made to develop an in-situ imaging capability under current-voltage applications to identify contamination defects in buried interfaces. JEOL UK, with 10% world market share, are implementing this imaging method in their products.
- Author contribution statement
- -
- Non-English
- No
- English abstract
- -