A 35-μm Pitch IR Thermo-Mechanical MEMS Sensor With AC-Coupled Optical Readout
- Submitting institution
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University of Northumbria at Newcastle
- Unit of assessment
- 12 - Engineering
- Output identifier
- 25203562
- Type
- D - Journal article
- DOI
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10.1109/JSTQE.2014.2384503
- Title of journal
- IEEE Journal of Selected Topics in Quantum Electronics
- Article number
- 2701306
- First page
- -
- Volume
- 21
- Issue
- 4
- ISSN
- 1077-260X
- Open access status
- Out of scope for open access requirements
- Month of publication
- December
- Year of publication
- 2014
- URL
-
-
- Supplementary information
-
-
- Request cross-referral to
- -
- Output has been delayed by COVID-19
- No
- COVID-19 affected output statement
- -
- Forensic science
- No
- Criminology
- No
- Interdisciplinary
- No
- Number of additional authors
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4
- Research group(s)
-
-
- Proposed double-weighted
- No
- Reserve for an output with double weighting
- No
- Additional information
- Uncooled thermomechanical infrared detection is a promising new technology to realise low-cost and sensitive thermal cameras. This paper introduces the first detector with a pixel size of 35x35 µm for improved spatial resolution, as compared to conventional detectors with pitch sizes of 100 µm and 50 µm. Shrinking pixel size without any sacrifice in sensitivity is challenging. The new readout method described in the paper allows surpassing the noise performance of its larger-pixel competitors. The study was financially supported by Aselsan Inc. (Ankara, Turkey), and the developed technology was licensed to the company.
- Author contribution statement
- -
- Non-English
- No
- English abstract
- -
