Non-destructive imaging of buried electronic interfaces using a decelerated scanning electron beam
- Submitting institution
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University of York
- Unit of assessment
- 12 - Engineering
- Output identifier
- 55025625
- Type
- D - Journal article
- DOI
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10.1038/ncomms12701
- Title of journal
- Nature Communications
- Article number
- 12701
- First page
- -
- Volume
- 7
- Issue
- -
- ISSN
- 2041-1723
- Open access status
- Compliant
- Month of publication
- September
- Year of publication
- 2016
- URL
-
-
- Supplementary information
-
-
- Request cross-referral to
- -
- Output has been delayed by COVID-19
- No
- COVID-19 affected output statement
- -
- Forensic science
- No
- Criminology
- No
- Interdisciplinary
- No
- Number of additional authors
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3
- Research group(s)
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B - Intelligent Systems and Nano-Science
- Proposed double-weighted
- No
- Reserve for an output with double weighting
- No
- Additional information
- Seagate produces 40% of the world’s hard disk drives. This imaging work with JEOL has been used by Seagate in Derry (Contact: Senior Engineer, Seagate) and adopted to improve designs and processes of their read head production, resulting in 15% increase in production yield. Our method has also been applied to magnetic random access memory in collaboration with Imec in Belgium (Contact: Project lead, IMEC). The technique has been patented and is under development for commercialization by JEOL (Contact: Two senior engineers, JEOL).
- Author contribution statement
- -
- Non-English
- No
- English abstract
- -