Carbon nanotube micro-contactors on ohmic substrates for on-chip microelectromechanical probing applications at wafer level
- Submitting institution
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The University of Surrey
- Unit of assessment
- 12 - Engineering
- Output identifier
- 9003907_1
- Type
- D - Journal article
- DOI
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10.1016/j.carbon.2019.04.115
- Title of journal
- Carbon
- Article number
- -
- First page
- 117
- Volume
- 150
- Issue
- -
- ISSN
- 0008-6223
- Open access status
- Compliant
- Month of publication
- -
- Year of publication
- 2019
- URL
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-
- Supplementary information
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- Request cross-referral to
- -
- Output has been delayed by COVID-19
- No
- COVID-19 affected output statement
- -
- Forensic science
- No
- Criminology
- No
- Interdisciplinary
- No
- Number of additional authors
-
-
- Research group(s)
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-
- Proposed double-weighted
- No
- Reserve for an output with double weighting
- No
- Additional information
- This work, sponsored by Smiths Interconnect, has been recognised with the Most Inspiring Presentation award and the IEEE William R Mann Memorial Student travel grant at the IEEE Semiconductor Wafer Test Conference, San Diego 2018, and has also been presented at the MRS Fall 2019 (Boston, EN15.06.26). This work demonstrates that carbon nanotubes are a viable technology for replacing copper electro-mechanical contactors, showing long term repeatability and resilience.
- Author contribution statement
- -
- Non-English
- No
- English abstract
- -
