Surface and subsurface characterisation in micro-milling of monocrystalline silicon
- Submitting institution
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Robert Gordon University
- Unit of assessment
- 12 - Engineering
- Output identifier
- Pancholi_1
- Type
- D - Journal article
- DOI
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10.1007/s00170-015-7308-7
- Title of journal
- The International Journal of Advanced Manufacturing Technology
- Article number
- -
- First page
- 1319
- Volume
- 81
- Issue
- 5-8
- ISSN
- 1433-3015
- Open access status
- Out of scope for open access requirements
- Month of publication
- -
- Year of publication
- 2015
- URL
-
-
- Supplementary information
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- Request cross-referral to
- -
- Output has been delayed by COVID-19
- No
- COVID-19 affected output statement
- -
- Forensic science
- No
- Criminology
- No
- Interdisciplinary
- No
- Number of additional authors
-
-
- Research group(s)
-
-
- Proposed double-weighted
- No
- Reserve for an output with double weighting
- No
- Additional information
- This work is the result of a grant funded by EPSRC (EP/M020657/1) and a Visiting Scholarship provided by the State Key Laboratory of Mechanical Transmission in Chongqing University (China) for the support for this work. It is novel work to machine the brittle material as monocrystalline silicon and led to a US Patent Application (US20200039109A1) and similar application of such machining has been developed for optical neurological prosthetics by collaborating partners at Newcastle University.
- Author contribution statement
- -
- Non-English
- No
- English abstract
- -
