On the origin and magnitude of surface stresses due to metal nanofilms
- Submitting institution
-
The Open University
- Unit of assessment
- 12 - Engineering
- Output identifier
- 1456826
- Type
- D - Journal article
- DOI
-
10.1039/C5NR08789A
- Title of journal
- Nanoscale
- Article number
- -
- First page
- 4245
- Volume
- 8
- Issue
- -
- ISSN
- 2040-3364
- Open access status
- Out of scope for open access requirements
- Month of publication
- January
- Year of publication
- 2016
- URL
-
-
- Supplementary information
-
http://www.rsc.org/suppdata/c5/nr/c5nr08789a/c5nr08789a1.pdf
- Request cross-referral to
- -
- Output has been delayed by COVID-19
- No
- COVID-19 affected output statement
- -
- Forensic science
- No
- Criminology
- No
- Interdisciplinary
- No
- Number of additional authors
-
1
- Research group(s)
-
-
- Proposed double-weighted
- No
- Reserve for an output with double weighting
- No
- Additional information
- Metallisation is a vital process for micro- and nano-fabrication, allowing the controlled preparation of material surfaces with thin films of a variety of metals. The extensive applications of metallised substrates include chemical sensors and nanoelectronics. We report an experimental study of the metallization of silicon cantilevers with nano-films of chromium and titanium. Analysis showed that metallisation causes a constant stress along the length of the beam, which can be calculated from interferometric quantification of the beam curvature. This work is expected to lead to a greater reliability, and lower risk of failure, in micro- and nano-electromechanical systems and devices.
- Author contribution statement
- -
- Non-English
- No
- English abstract
- -
